SEM-integrated platforms

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Table of contents

1 Probing into the micro-world: imaging, tools and state of the art 
1 Micro-robotics, observation and actuation
1.1 Physics of the micro-world
1.1.1 Scale effect
1.1.2 Surface forces
1.2 Observing the micro- and nano-world
1.2.1 Optical microscopes
1.2.2 Electron microscopes
1.2.3 Local probe microscopes
1.3 Micro-robotic systems and SEM-controlled characterisation
1.3.1 Micro-robotic actuators
1.3.2 SEM-integrated platforms
2 Sensing and imaging through Atomic Force Microscopy
2.1 General principles of AFM
2.1.1 AFM modes
2.1.2 Dynamic AFM control modes
2.2 Tuning fork AFM
2.2.1 Operating principle
2.2.2 Force measurement
2.2.3 Conservative and dissipative forces
2.2.4 Stiffness measurement
2.3 AFM environments
2.4 High-frequency AFM
3 Objectives
2 Micro-robotic probes designed from standard quartz resonators
1 Mechanical properties of tuning forks
1.1 Quality factor
1.2 Stiffness
1.3 Sensitivity
2 Probe fabrication
2.1 Probe tip
2.2 Adhesive and balancing
2.3 Tip positioning
2.4 Probe holder and fixation
3 Towards higher frequencies
3.1 Tuning fork overtones
3.2 Other tuning fork frequencies
3.3 Thickness shear quartz resonators
3.3.1 Horizontally mounted resonators
3.3.2 Disc resonators
3.3.3 Contoured beam resonators
3.4 Comparison
4 MHz-range contoured beam quartz analysis
4.1 Hypotheses
4.2 Results
5 Conclusion
3 Ambient imaging with quartz probes
1 Experimental setup
1.1 Quartz control, electronics and software
1.2 Actuators
1.3 Control parameters
2 Experimental protocol and testing
2.1 Attractive and repulsive modes
2.2 Samples
2.3 Imaging criteria
2.4 Artefacts and causes
2.5 Preliminary internal characterisation
2.5.1 Actuator overshoot
2.5.2 Overall Z-axis drift
2.5.3 Adhesion and meniscus effect
2.6 Adopted conventions
3 Attractive mode FM-AFM
3.1 32.768 kHz probe on calibration grating
3.2 32.768 kHz and 196 kHz overtone probes on paraffin wax
3.3 3.58 MHz probe on silicon surface
3.4 Overview of the attractive mode
4 Repulsive mode FM-AFM
4.1 32.768 kHz probe on paraffin wax
4.2 100 kHz probe on paraffin wax
4.3 100 kHz probe on calibration grating
4.4 10 MHz probe on calibration grating
4.5 3.58 MHz probe on calibration grating
4.6 3.58 MHz probe on paraffin wax
5 Conclusion and perspectives
4 SEM-embedded micro-robotic sensing with quartz tuning forks
1 Quartz probe sensing and in air, vacuum and SEM environments
1.1 Setup and pressure
1.2 Effect on the piezo-actuating system
1.3 Quartz frequency, quality factor and dissipation
1.4 Influences on settling time
1.5 Influences on sensitivity
1.6 Influence of the electron beam in a Scanning Electron Microscope
1.7 Conclusion and perspectives
2 Membrane stiffness measurement in a SEM
2.1 Samples and setup
2.2 Membrane stiffness measurements
2.3 Results
3 Conclusion
Conclusion and Perspectives