MEMS encompassing actuation means

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Table of contents

Introduction
1 Microfabricated tools for conducting mechanical studies on individual cells: state-of-the art
1.1 The cell architecture: some fundamentals
1.2 Overview of microfabricated tools for conducting mechanical studies on individual cells
1.2.1 Preliminary remarks
1.2.2 MEMS encompassing actuation means
1.2.2.1 Electrostatic comb drives
1.2.2.2 Electrothermal beams
1.2.2.3 Electro-active polymers
1.2.2.4 Magnetic fields
1.2.2.5 Electric fields
1.2.2.6 Optical gradients
1.2.2.7 Fluid flows
1.2.3 MEMS providing sensing capabilities
1.2.3.1 Deformable beam-based sensors
1.2.3.2 Piezoresistive strain gauges
1.2.3.3 Capacitive sensors
1.3 Discussions
1.3.1 Nature and number of cells targeted
1.3.2 Constraints imposed by the cell environment
1.3.3 Type of mechanical properties probed: relevance of the cell elastic modulus
1.4 Summary and conclusions
2 Sensing forces in cell studies with beam resonators: theoretical back- ground
2.1 Vibration of a CC beam subjected to an axial force: exact solution
2.1.1 Effects of an axial force on the fundamental frequency
2.1.2 Effects of an axial force on the first mode shape
2.2 Vibrations of a CC beam subjected to an axial force: approximate solution via energy methods
2.3 Vibration of a CC beam in fluids
2.3.1 Presence of a fluid: impact on the resonance frequency and oscillation amplitude
2.3.2 Energy losses: notion of quality factor (Q factor)
2.3.3 Vibration of a beam in air and in water: numerical application .
2.4 Vibrations of a CC beam in fluids: parametric analysis
2.4.1 Varying the beam geometry: influence on the mass added by a fluid
2.4.2 Varying the beam geometry: influence on the resonance frequency and Q factor
2.4.3 Varying the beam geometry: influence on the force sensitivity
2.5 Conclusion
3 Design of a planar resonant structure sensitive to out-of-plane forces
3.1 Overall description and key features of the structure
3.2 Theoretical analysis
3.2.1 Preliminary remarks
3.2.2 Static behavior: large deflection of the planar structure
3.2.3 Dynamic analysis: effects of a static predeflection on the oscillation of the outer beams
3.3 Discussion about the dimensions of the planar structure
3.4 Static and dynamic behavior of the structure: numerical application
3.4.1 Theoretical results: static deflection
3.4.2 Theoretical results: variations of resonance frequency
3.5 Conclusion
4 Experimental validation and first investigations conducted on biologi- cal samples
4.1 Experimental arrangement
4.1.1 Overview
4.1.2 Implementation of an optical fiber displacement probe
4.2 Comparison between theory and experiments
4.2.1 Evaluation of static deflections
4.2.2 Evaluation of dynamic performances
4.2.2.1 Resonance frequency
4.2.2.2 Vibrations at the central beam
4.2.2.3 Quality factor
4.2.2.4 Frequency variations induced by large displacements
4.2.2.5 Frequency variations induced by small forces
4.3 Measuring the elastic properties of supersoft materials
4.3.1 Calibration of the prototype with gel samples
4.3.2 Direct extraction of the Young’s modulus of a lobster egg
4.4 Conclusion
Conclusions and suggestions for future research 94
Appendix
Abbreviations and Notations
List of publications
Bibliography