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Table of contents
Introduction
1.1 Multi-domain virtual prototyping
1.2 Electronic system-level design
1.3 MEMS modeling and simulation
1.4 Contributions
1.5 Outline
2 State of the art
2.1 Introduction
2.2 MEMS system-level design
2.2.1 Electrostatic transducers
2.2.2 Component-basedmodeling
2.2.3 Simulation strategies
2.3 HDL-based reducedmodels
2.3.1 Model order reduction principles
2.3.2 Implementation in HDLs
2.4 SystemC, a system-level design language
2.4.1 Basic concepts
2.4.2 AMS extensions
2.4.3 Other extensions
2.4.4 Signal conditioning
2.5 Summary
3 ESL-basedMEMSmodeling
3.1 Introduction
3.2 Modelingmethodologies
3.2.1 Equivalent-circuit representations
3.2.2 Energy-basedmethodologies
3.2.3 Transfer function and state-space system
3.3 MEMS macromodels
3.3.1 Accelerometers
3.3.2 Gyroscopes
3.4 Conclusion
4 System-level simulation API
4.1 Introduction
4.2 Motivating example
4.2.1 Model definition
4.2.2 Use case
4.2.3 Results
4.3 API Implementation
4.3.1 Device
4.3.2 Test bench
4.3.3 Add-ons
4.4 API use case
4.4.1 Test-bench configuration
4.4.2 Simulation results
4.4.3 Simulation performance
4.5 Conclusion
5 Case study
5.1 Introduction
5.2 Methods &Material
5.2.1 Device under test
5.2.2 Modeling procedure
5.2.3 Test-bench definition
5.3 Experiment
5.4 Results
5.4.1 Modeling accuracy
5.4.2 Simulation performance
5.5 Conclusion
6 Conclusions
6.1 Contributions
6.2 Future work
6.3 Closing thoughts
Bibliography
Appendices
