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Table of contents
Chapter 1 Multilayer mirrors in the soft x-ray and extreme ultraviolet ranges
1.1 Soft x-ray and extreme ultraviolet light
1.2 Multilayer mirrors
1.2.1 Theory and principle of multilayer mirrors
1.2.2 Design of multilayer mirrors for the soft x-ray and EUV ranges
1.3 Applications of multilayer mirrors
1.3.1 Astronomical observation with multilayer mirrors
1.3.2 Extreme ultraviolet lithography
1.3.3 Photoemission microscope
1.3.4 X-ray standing wave
1.3.5 Other applications
1.4 Multilayer fabrication
1.5 Thermal stability of multilayer mirrors
1.6 Development of tri-layer multilayer optics
1.7 Proposal of Co-based multilayers
1.8 Outline
Chapter 2 Analysis techniques
2.1 X-ray reflectometry in hard x-ray range
2.2 X-ray diffraction (XRD)
2.3 Reflectivity with synchrotron radiation
2.3.1 Description of the BEAR beamline
2.3.2 Experiments at the BEAR beamline
1) Reflectivity measurements
2) Rocking curve (off-specular) measurements
3) Fluorescence measurement induced by x-ray standing wave
2.4 Reflectivity with MONOX apparatus
2.5 X-ray emission spectroscopy (XES)
2.5.1 The principle of XES
2.5.2 Description of IRIS setup
2.6 Nuclear magnetic resonance (NMR) spectroscopy
2.7 Time-of-flight secondary ion mass spectrometry (ToF-SIMS)
2.8 Transmission electron microscopy
2.8.1 Principle of TEM
2.8.2 Preparation of sliced sample
2.8.3 Description of the TEM experiments
Chapter 3 Study of Co/Mo2C multilayers
3.1 Investigation of the reflectivity of Co/Mo2C multilayer upon thermal treatment
3.1.1 Introduction
3.1.2 Experimental details
3.1.3 Results and discussion
3.1.4 Conclusions
3.2 Evaluation of structure and optical parameters of Co/Mo2C multilayer upon annealing
3.2.1 Introduction
3.2.2 Results and discussion
1) Fitting of reflectivity curves
2) Enhanced Fluorescence by XSW
3) Simulation of the electric field within the multilayer stack
3.2.3 Conclusions
3.3 Observation of the first buried interfaces within Co/Mo2C multilayers studied by soft x-ray standing wave enhanced photoemission spectroscopy
3.3.1 Introduction
3.3.2 Results and discussion
3.3.3 Conclusions
3.4 Interface analysis of heat-treated Co/Mo2C multilayers
3.4.1 Introduction
3.4.2 Experimental methods
3.4.3 Results and discussion
1) X-ray emission spectroscopy
2) Zero-field nuclear magnetic resonance spectroscopy
3) X-ray diffraction
4) Time of flight-secondary ions mass spectroscopy
5) Transmission electron microscopy
3.4.4 Discussion
3.4.5 Conclusions
Chapter 4 Study of Co/Mo2C/Y multilayers
4.1 Optical and structural characterization of the Co/Mo2C/Y system
4.1.1 Introduction
4.1.2 Experimental details
4.1.3. Results and discussion
1) X-ray reflectometry at 0.154 nm
2) Extreme ultra-violet reflectivity with synchrotron radiation
3) Zero-field nuclear magnetic resonance spectroscopy
4) X-ray diffraction
4.1.4 Discussion
4.1.5 Conclusions
4.2 Transmission electron microscopy observation of Co/Mo2C/Y system
4.2.1 Introduction
4.2.2 Experimental details
4.2.3 Results and discussion
1) Scanning transmission electron microscopy
2) In-depth intensity profiles
3) Energy dispersive x-rays spectrometry (EDS)
4) High-resolution images and selected-area electron diffraction
4.2.4 Conclusions
Chapter 5 Conclusions and perspectives
Appendix І: Miedema’s model
References
Appendix П: other publications



