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Table of contents
1 Chapter 1: Phase Change Memory – From Scientific Context to Application
1.1 Introduction
1.2 Overview on Phase Change Memory
1.3 How does it work?
1.4 Phase Change Memory Operation
1.5 The In-Sb-Te alloy
1.6 Thermal properties of the PCM
1.7 Objectives of this research work
1.8 References
2 Chapter 2: Thermal characterization of IST thin films
2.1 Introduction
2.2 Description of the 3ω method
2.3 Photothermal Radiometry technique
2.3.1 Principle
2.3.2 MPTR setup working at high temperature
2.3.3 Optical Transducer
2.3.4 Phase-lag calibration
2.4 Conclusion
2.5 References
3 Chapter 3: Thermal Modeling of Heat Transfer in 3ω and MPTR experiments
3.1 Introduction
3.2 Heat diffusion model in a composite stack of thin films
3.2.1 General formulation
3.2.2 From time to frequency
3.3 From the general formulation to the 3ω and MPTR experimental configurations
3.3.1 Practical considerations about the heat diffusion length
3.3.2 Dealing with spatial coordinates with 3ω method
3.3.3 Dealing with spatial coordinates with MPTR method
3.4 Practical estimation of RT in the 3ω and MPTR methods
3.4.1 Sensitivity to RT using the 3ω method
3.4.2 Sensitivity to RT using the MPTR method
3.5 Identification of RT
3.6 Evaluation of k and TBR
3.7 Conclusion
3.8 References
4 Chapter 4: Experiments, results and discussions
4.1 Introduction
4.2 Useful thermophysical properties for further studies
4.3 IST film deposition
4.4 Thermal characterization using the 3ω technique
4.4.1 Sample preparation
4.4.2 Structural analysis of the samples
4.4.3 3ω Measurements
4.4.4 Discussion on the thermal conductivity
4.4.5 Discussion on the thermal boundary resistance
4.5 Thermal Characterization using Modulated Photothermal Radiometry (MPTR)
4.5.1 Introduction
4.5.2 Structural and chemical analysis
4.5.3 MPTR Measurements
4.5.4 Discussion on thermal conductivity
4.5.5 Discussion on the TBR
4.6 Conclusion
4.7 References
5 Conclusions and perspectives
6 Appendix A: Methodologies for structural and interface characterization
6.1 Introduction
6.2 Scanning Electron Microscopy and X-ray microanalysis
6.3 X-Ray Diffraction and Reflectivity Techniques
6.4 Raman Spectroscopy
6.5 Time of Flight Secondary Ion Mass Spectroscopy (ToF-SIMS)
7 Appendix B: Growth MOCVD technique for In-Sb-Te thin film deposition
